Low temperature crystallization and thick single layer of PbTiO3 thin film by metallo-organic compound decomposition with an additive of PVAC

被引：5

作者：

Wu, Xiaoqing ^{[1
]}

Ren, Wei ^{[1
]}

Shi, Peng ^{[1
]}

Li, Haiyan ^{[1
]}

Yao, Xi ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, Elect Mat Res Lab, Xian 710049, Peoples R China

来源：

FERROELECTRICS | 2006年 / 335卷

关键词：

ferroelectric; thin film; crystallization; polymer; PVAC;

D O I：

10.1080/00150190600689639

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Polyvinyl acetate (PVAC) has been investigated as an additive in a metallo-organic decomposition process to increase the single-layer thickness and reduce the crystallization temperature of PbTiO3 thin films. It has been found that PbTiO3 thin films obtained are dense and crack-free. PVAC can reduce the crystallization temperature of PbTiO3 thin films from 550 degrees C to 450 degrees C. The single-layer thickness of the crack-free films increases from 0.08 mu m to 0.83 mu m by adding PVAC in PbTiO3 precursor solutions. Adding PVAC in PT precursor solutions can effectively improve the preparing process of PbTiO3 thin films and make it more compatible with an IC process.

引用

页码：113 / 118

页数：6