Metal-armouring for shock protection of MEMS

被引：27

作者：

Delahunty, A. K. ^{[1
]}

Pike, W. T. ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Opt & Semicond Devices Grp, London SW7 2AZ, England

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 215卷

关键词：

MEMS; Shock protection; Metal-armour; Solder; CONTACT; SENSORS;

D O I：

10.1016/j.sna.2013.11.008

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper demonstrates a novel concept for the shock protection of MEMS suspensions: solder is incorporated within the sidewalls of the suspension to produce protective metal armouring. This provides solder-solder contact at the extremes of the suspension travel, greatly increasing the shock resistance. Model suspension systems were fabricated using deep reactive ion etching (DRIE) and shock tested in a drop-test rig at acceleration levels up to 6000 x g. The solder armour proved to absorb 90% of the collision kinetic energy and double the shock resistance of the MEMS suspension. (C) 2013 Published by Elsevier B.V.

引用

页码：36 / 43

页数：8

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