Mechanics of mems: a ireview of modeling, analysis and design

The paper provides a review of the literature dedicated to existing modeling, analysis, synthesis and optimization tools, together with the associated design procedures for MEMS applications, by looking. at the approximate analytical algorithms and finite element procedures in the static, dynamical and coupled-field domains as applied to a large compartment of compliant members and their corresponding devices. The paper gives a classification of MEMS according to their structure and another classification as a function of their function. Main architectures of compliant microdevices are also reviewed, including torsion mirrors, bending mirrors, bimorph/multimorph transducers, accelerometers, gyroscopes, scratch drives, out-of-the-plane microcantilevers, sensing devices, resonators, switches or filters. Attention is dedicated to operational means of actuation, such as thermal, electrostatic, magnetic, electromagnetic, piezoelectric or shape-memory-generated, and to their integration into the overall microsystem design. Numerical modeling techniques, such as finite or boundary element model at olgorithms/codes that are utilized in the analysis and design of MEMS are also presented.