Introduction of amino groups on the surface of thin photo definable epoxy resin layers via chemical modification

被引:30
作者
Schaubroeck, David [1 ]
De Baets, Johan [1 ]
Desmet, Tim [2 ]
Van Vlierberghe, Sandra [2 ]
Schacht, Etienne [2 ]
Van Calster, Andre [1 ]
机构
[1] Univ Ghent, Ctr Microsyst Technol, ELIS, IMEC, B-9052 Ghent, Belgium
[2] Univ Ghent, Polymer Chem & Biomat Res Grp, B-9000 Ghent, Belgium
关键词
Surface modification; Cyanuric chloride; Epoxy cresol novolac resin; CONTAINING VINYL MONOMERS; POLYIMIDE FILMS; GRAFT-COPOLYMERIZATION; ELECTROLESS DEPOSITION; INFRARED SPECTRA; POLYMER LAYERS; ADHESION IMPROVEMENT; PLASMA TREATMENT; BUILDUP LAYERS; S-TRIAZINE;
D O I
10.1016/j.apsusc.2009.06.043
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The introduction of amine groups on the surface of dielectric resins improves the adhesion with electrochemically deposited metals. In this work, etched epoxy resin surfaces are modified with aliphatic amines via a two step wet chemical reaction approach. First, cyanuric chloride is introduced on the surface. Next, the remaining reactive sites of cyanuric chloride are used to couple an aliphatic polyamine. Both reaction steps are optimized by variation of reaction parameters such as concentration, chemicals, temperature and time. A detailed surface characterization after each reaction step is provided using following techniques: ATR-IR, SEM-EDS, XPS and AFM. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:8780 / 8787
页数:8
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