Rapid pressure-assisted sinter bonding in air using 200 nm Cu particles and enhancement of bonding strength by successive pressureless annealing

被引:0
作者
KIM, Myeong In [1 ]
Lee, Jong-Hyun [1 ]
机构
[1] Seoul Natl Univ Sci & Technol, Dept Mat Sci & Engn, 232 Gongneung Ro, Seoul 139743, South Korea
关键词
submicron Cu particles; Cu paste; malic acid; sinter bonding; successive annealing; shear strength; LOW-TEMPERATURE; NANOPARTICLE PASTE; SURFACE-ROUGHNESS; FABRICATION; SILVER;
D O I
10.1016/S1003-6326(22)65821
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
To design an effective and realistically applicable sinter bonding process for power devices, we proposed a two-step process using a 200 nm Cu-particle-based paste to form a bondline having high-temperature sustainability and superior thermal conductance. This process involved rapid pressure-assisted sinter bonding in air followed by pressureless annealing in a nitrogen atmosphere. In the case of a paste prepared with a mixture of 20 wt.% malic acid and 80 wt.% ethylene glycol, sinter bonding at 300 degrees C and 5 MPa for only 30 s resulted in a sufficient shear strength of 23.1 MPa. The shear strength was significantly enhanced to 69.6 MPa by the additional pressureless aging for 30 min. Therefore, the two-step sinter bonding process is expected to provide an outstanding production rate as a next-generation sinter bonding process.
引用
收藏
页码:629 / 638
页数:10
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