Precise positioning of piezo-actuated stages using hysteresis-observer based control

被引：151

作者：

Lin, Chih-Jer ^{[1
]}

Yang, Sheng-Ren ^{[1
]}

机构：

[1] Da Yeh Univ, Dept Mech & Automat Engn, Da Tsuen 51505, Chang Hwa Count, Taiwan

来源：

MECHATRONICS | 2006年 / 16卷 / 07期

关键词：

modelling; quadratic programming; parameter estimation; observers; real-time;

D O I：

10.1016/j.mechatronics.2006.03.005

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The piezo-actuated stages are composed of the piezoelectric actuator and the positioning, mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behaviour of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward. compensating based on the hysteresis observer is proposed in this paper. To verify the consistency of the proposed method, the experiments are implemented by real-time control to be compared with the numerical simulation. (C) 2006 Elsevier Ltd. All rights reserved.

引用

页码：417 / 426

页数：10