Precise positioning of piezo-actuated stages using hysteresis-observer based control

被引：151
作者：
Lin, Chih-Jer [1 ]
Yang, Sheng-Ren [1 ]
机构：
[1] Da Yeh Univ, Dept Mech & Automat Engn, Da Tsuen 51505, Chang Hwa Count, Taiwan
来源：
MECHATRONICS | 2006年 / 16卷 / 07期
关键词：
modelling; quadratic programming; parameter estimation; observers; real-time;
D O I：
10.1016/j.mechatronics.2006.03.005
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The piezo-actuated stages are composed of the piezoelectric actuator and the positioning, mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behaviour of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward. compensating based on the hysteresis observer is proposed in this paper. To verify the consistency of the proposed method, the experiments are implemented by real-time control to be compared with the numerical simulation. (C) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码：417 / 426
页数：10
相关论文
共 14 条
  • [1] Abreu G. L. C. M. de, 2004, J. Braz. Soc. Mech. Sci. & Eng., V26, P117
  • [2] Analytical modeling for the design of a piezoelectric rotating-mode motor
    Budinger, M
    Rouchon, JF
    Nogarede, B
    [J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2004, 9 (01) : 1 - 9
  • [3] Croft D, 2000, P AMER CONTR CONF, P2123, DOI 10.1109/ACC.2000.879576
  • [4] Hysteresis and vibration compensation for piezoactuators
    Croft, D
    Devasia, S
    [J]. JOURNAL OF GUIDANCE CONTROL AND DYNAMICS, 1998, 21 (05) : 710 - 717
  • [5] Phase control approach to hysteresis reduction
    Cruz-Hernández, JM
    Hayward, V
    [J]. IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2001, 9 (01) : 17 - 26
  • [6] MODELING HYSTERESIS IN PIEZOCERAMIC ACTUATORS
    GE, P
    JOUANEH, M
    [J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1995, 17 (03): : 211 - 221
  • [7] Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators
    Ge, P
    Jouaneh, M
    [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 1997, 20 (02): : 99 - 111
  • [8] Tracking control of a piezoceramic actuator
    Ge, P
    Jouaneh, M
    [J]. IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 1996, 4 (03) : 209 - 216
  • [9] A lumped parameter electromechanical model for describing the nonlinear behavior of piezoelectric actuators
    Goldfarb, M
    Celanovic, N
    [J]. JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 1997, 119 (03): : 478 - 485
  • [10] Piezomechanics using intelligent variable-structure control
    Hwang, CL
    Jan, C
    Chen, YH
    [J]. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2001, 48 (01) : 47 - 59
12