Group III-nitride-based gas sensors for combustion monitoring

被引:80
|
作者
Schalwig, J [1 ]
Müller, G
Eickhoff, M
Ambacher, O
Stutzmann, M
机构
[1] EADS Deutschland GmbH, Corp Res Ctr, D-81663 Munich, Germany
[2] Tech Univ Munich, Walter Schottky Inst E25, D-85748 Garching, Germany
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2002年 / 93卷 / 1-3期
关键词
gas sensors; GaN; GaN/AlGaN-heterostructures; combustion monitoring;
D O I
10.1016/S0921-5107(02)00050-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The paper reports on novel gas-sensing devices based on group III-nitride materials. Both platinum (Pt)-GaN Schottky diodes as well as high-electron-mobility transistors formed from GaN/AlGaN heterostructures with catalytically active platinum gates were investigated. The performance of these devices towards a number of relevant exhaust gas components such as H-2, HC, CO, NO, was tested. Test gas concentrations were chosen to simulate exhaust gas emissions from lean-burn 4-stroke petrol engines. We found that GaN-based devices with platinum electrodes are mainly sensitive to hydrogen and unsaturated hydrocarbons with a sizeable cross-sensitivity to CO and NO2. These performance characteristics are similar to those of comparable SiC devices. With GaN devices this performance, however, can be obtained at a reduced complexity of the device processing and a greater freedom in the choice of sensor architectures. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:207 / 214
页数:8
相关论文
共 50 条
  • [31] Thermal transport properties of hexagonal monolayer group-III nitride nanoribbons
    Karaaslan, Yenal
    PHYSICA B-CONDENSED MATTER, 2022, 640
  • [32] High temperature growth of SiC and group III nitride structures in production reactors
    Schmitz, D
    Beccard, R
    Strauch, G
    Juergensen, H
    Woelk, E
    Bremser, M
    1998 FOURTH INTERNATIONAL HIGH TEMPERATURE ELECTRONICS CONFERENCE, 1998, : 5 - 9
  • [33] Integration and Testing of Novel MOX Gas Sensors for IoT-based Indoor Air Quality Monitoring
    Al-Okby, Mohammed Faeik Ruzaij
    Neubert, Sebastian
    Roddelkopf, Thomas
    Thurow, Kerstin
    21ST IEEE INTERNATIONAL SYMPOSIUM ON COMPUTATIONAL INTELLIGENCE AND INFORMATICS (CINTI), 2021, : 179 - 185
  • [34] High temperature growth of SiC and group III nitride structures in production reactors
    Schmitz, D
    Beccard, R
    Woelk, EG
    Strauch, G
    Juergensen, H
    1998 HIGH-TEMPERATURE ELECTRONIC MATERIALS, DEVICES AND SENSORS CONFERENCE, 1998, : 132 - 135
  • [35] Recent progress in group-III nitride light-emitting diodes
    Mukai, T
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (02) : 264 - 270
  • [36] Recent progress in group III-nitride nanostructures: From materials to applications
    Chen, Fei
    Ji, Xiaohong
    Lau, Shu Ping
    MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2020, 142
  • [37] Recent Development and Future Prospect of Group III Nitride-Based Light Emitting Diode for Displays and General Lighting
    Amano, Hiroshi
    IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2010, : 521 - 524
  • [38] Opto-electronic devices based on wurtzite group-III nitride films with non-polar orientations
    Ghosh, Sandip
    PROCEEDINGS OF THE 2007 INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES: IWPSD-2007, 2007, : 323 - 324
  • [39] Metal oxide nanowire gas sensors for indoor and outdoor environmental monitoring
    Koeck, Anton
    Brunet, Elise
    Freudenberg, Oliver
    Gamauf, Christoph
    Kraft, Jochen
    Mutinati, Giorgio C.
    Maier, Thomas
    Nemecek, Alexander
    Schrank, Franz
    Schrems, Martin
    Siegele, Martin
    Siegert, Joerg
    Steinhauer, Stephan
    Teva, Jordi
    MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS V, 2013, 8725
  • [40] Application of nanocrystalline metal oxide gas sensors for air quality monitoring
    Rickerby, D. G.
    Skouloudis, A. N.
    INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2014, 11 (5-8) : 583 - 593