Molecular Layer Deposition on Carbon Nanotubes

被引：33

作者：

Brown, Joseph J. ^{[1
]}

Hall, Robert A. ^{[2
]}

Kladitis, Paul E. ^{[3
]}

George, Steven M. ^{[1
]}

Bright, Victor M. ^{[1
]}

机构：

[1] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA

[2] Univ Colorado, Dept Chem & Biochem, Boulder, CO 80309 USA

[3] Air Force Inst Technol, Dept Elect Engn, Wright Patterson AFB, OH 45433 USA

来源：

ACS NANO | 2013年 / 7卷 / 09期

关键词：

carbon nanotube; molecular layer deposition; ALD; mechanical testing; conformal; composite; scaffold; MECHANICAL-PROPERTIES; THIN-FILMS; GROWTH; INFILTRATION; NANOFIBERS; NANOPARTICLES; DIELECTRICS; QUANTITIES; DISPERSION; MEMBRANE;

D O I：

10.1021/nn402733g

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Molecular layer deposition (MID) techniques were used to deposit conformal coatings on bulk quantities of carbon nanotubes (CNTs). Several metalcone MID chemistries were employed, including alucone (trimethylaluminum/glycerol and trimethylaluminum/ethylene glycol), titanicone (TiCl4/glycerol), and zincone (diethyl zinc/glycerol). The metalcone MID films grew directly on the CNTs and MLD initiation did not require atomic layer deposition (ALD) of an adhesion layer. Transmission electron microscopy revealed that MLD formed three-dimensional conformal deposits throughout a CNT scaffold. Mechanical testing was also performed on sheets of (CNT networks coated by MID. Young's Modulus values improved from an initial value of 510 MPa for uncoated CNT sheet to values that ranged from 2.2 GPa, for 10 nm of glycerol alucone (AIGL), to 8.7 GPa for a composite 5 nm AlGL + 5 nm Al2O3 coating.

引用

页码：7812 / 7823

页数：12

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