Modulation periods and ratios induced changes of microstructure and mechanical properties of AlN/ZrB2 multilayered coatings

被引：28

作者：

Li, D. J. ^{[1
]}

Wang, H. ^{[1
]}

Kang, Y. B. ^{[1
]}

Dong, L. ^{[1
]}

Liu, G. Q. ^{[1
]}

Gong, J. ^{[1
]}

Sun, Y. D. ^{[1
]}

Deng, X. Y. ^{[1
]}

机构：

[1] Tianjin Normal Univ, Coll Phys & Elect Informat Sci, Tianjin 300387, Peoples R China

来源：

VACUUM | 2009年 / 83卷 / 12期

基金：

中国国家自然科学基金;

关键词：

Magnetron sputtering; AlN/ZrB2 multilayered coatings; Modulation period; Modulation ratio; WEAR; STABILITY;

D O I：

10.1016/j.vacuum.2009.05.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

AlN/ZrB2 multilayered coatings were synthesized in a magnetron sputtering system. The extensive measurements were employed to investigate the influence of different nanoscale modulation periods and modulation ratios on microstructure and mechanical properties of the coatings. Analysis of X-ray diffraction, profiler and nanoindention indicated that multilayered coatings possessed much higher hardness and elastic modulus than monolithic AlN and ZrB2 coatings. At the substrate negative bias of -80 V, maximum hardness (34.1 GPa) and elastic modulus (469.8 GPa) were obtained in the multilayer with Lambda = 30 nm and t(AlN):t(ZrB2) = 1:3. This hardest multilayer showed a marked polycrystalline structure with the strong mixture of ZrB2 (001), ZrB2 (100), ZrB2 (101), AlN (100) textures. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：1411 / 1413

页数：3

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