Polyphosphazene membrane as a very sensitive resistive and capacitive humidity sensor

被引：23

作者：

Anchisini, R ^{[1
]}

Faglia, G ^{[1
]}

Gallazzi, MC ^{[1
]}

Sberveglieri, G ^{[1
]}

Zerbi, G ^{[1
]}

机构：

[1] UNIV BRESCIA,DIPARTIMENTO CHIM & FIS MAT,I-25133 BRESCIA,ITALY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 35卷 / 1-3期

关键词：

polyphosphazene membrane; resistive sensor; capacitive humidity sensor;

D O I：

10.1016/S0925-4005(97)80037-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Polydimethylphosphazene (PDMP) has been tested for the first time to fabricate a water resistive humidity sensor. The device consists of a PDMP free-standing membrane coated on both sides with gold electrodes forming a parallel capacitor. A change in electrical capacitance and resistance of about three orders of magnitude was observed with increasing relative humidity (RH) from 0% to 100%. The results show that polyphosphazenes are promising materials for resistive and capacitive sensors in the complete range of RH.

引用

页码：99 / 102

页数：4

共 34 条

[31] Ultrafast-response/recovery capacitive humidity sensor based on arc-shaped hollow structure with nanocone arrays for human physiological signals monitoring
Niu, Hongsen
Yue, Wenjing
Li, Yang
Yin, Feifei
Gao, Song
Zhang, Chunwei
Kan, Hao
Yao, Zhao
Jiang, Chengpeng
Wang, Cong
SENSORS AND ACTUATORS B-CHEMICAL, 2021, 334
[32] Thermal-assisted resistive sensor based on the PdCr alloy thin film for sensitive detection of hydrogen isotopes in helium atmosphere
Li, Mingzhao
Xiao, Chengjian
Ran, Guangming
Li, Jiamao
Wang, Junyan
Hou, Jingwei
Chen, Hao
Huang, Hongwen
Wang, Heyi
INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2024, 56 : 102 - 112
[33] Low-noise 16-bit First-order Delta-sigma Capacitance-to-digital Converter for Capacitive Humidity Sensor
Lee, Byeoncheol
Kim, Hyungseup
Kim, Jaesung
Han, Kwonsang
Shin, Sangyoun
Kim, Gyungtae
Sul, Woo Suk
Lee, Boung Ju
Lee, Sangmin
Ko, Hyoungho
SENSORS AND MATERIALS, 2019, 31 (05) : 1523 - 1533
[34] Development of resistive humidity sensor based on 3D ZnO NRS: MoS2 for real time monitoring of transformer insulation oil
Lee Y.
Lee K.
Lee, Keekeun (keekeun@ajou.ac.kr), 1600, Korean Institute of Electrical Engineers (69): : 586 - 593

← 1 2 3 4 →