Polyphosphazene membrane as a very sensitive resistive and capacitive humidity sensor

被引：23
|
作者：
Anchisini, R [1 ]
Faglia, G [1 ]
Gallazzi, MC [1 ]
Sberveglieri, G [1 ]
Zerbi, G [1 ]
机构：
[1] UNIV BRESCIA,DIPARTIMENTO CHIM & FIS MAT,I-25133 BRESCIA,ITALY
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 35卷 / 1-3期
关键词：
polyphosphazene membrane; resistive sensor; capacitive humidity sensor;
D O I：
10.1016/S0925-4005(97)80037-8
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Polydimethylphosphazene (PDMP) has been tested for the first time to fabricate a water resistive humidity sensor. The device consists of a PDMP free-standing membrane coated on both sides with gold electrodes forming a parallel capacitor. A change in electrical capacitance and resistance of about three orders of magnitude was observed with increasing relative humidity (RH) from 0% to 100%. The results show that polyphosphazenes are promising materials for resistive and capacitive sensors in the complete range of RH.
引用
收藏
页码：99 / 102
页数：4
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