Polyphosphazene membrane as a very sensitive resistive and capacitive humidity sensor

被引：23

作者：

Anchisini, R ^{[1
]}

Faglia, G ^{[1
]}

Gallazzi, MC ^{[1
]}

Sberveglieri, G ^{[1
]}

Zerbi, G ^{[1
]}

机构：

[1] UNIV BRESCIA,DIPARTIMENTO CHIM & FIS MAT,I-25133 BRESCIA,ITALY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 35卷 / 1-3期

关键词：

polyphosphazene membrane; resistive sensor; capacitive humidity sensor;

D O I：

10.1016/S0925-4005(97)80037-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Polydimethylphosphazene (PDMP) has been tested for the first time to fabricate a water resistive humidity sensor. The device consists of a PDMP free-standing membrane coated on both sides with gold electrodes forming a parallel capacitor. A change in electrical capacitance and resistance of about three orders of magnitude was observed with increasing relative humidity (RH) from 0% to 100%. The results show that polyphosphazenes are promising materials for resistive and capacitive sensors in the complete range of RH.

引用

页码：99 / 102

页数：4

共 34 条

[1] A Sensitive Detection Electronics for Resistive Sensor
Islam, T.
Siddiqui, F. A.
Khan, S. A.
Islam, S. S.
Harsh
PROCEEDINGS OF THE THIRD INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY, 2008, : 259 - +
[2] A highly sensitive capacitive-type humidity sensor using customized polyimide film without hydrophobic elements
Kim, YH
Kim, YJ
Lee, JY
Kim, JH
Shin, KH
SENSORS AND MATERIALS, 2004, 16 (03) : 109 - 117
[3] A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
Huang, Jian-Qiu
Li, Baoye
Chen, Wenhao
MICROMACHINES, 2016, 7 (05):
[4] Modeling and optimization of a microscale capacitive humidity sensor for HVAC applications
Sen, Ashis Kumar
Darabi, Jeff
IEEE SENSORS JOURNAL, 2008, 8 (3-4) : 333 - 340
[5] Capacitive Humidity Sensor Based on Carbon Black/Polyimide Composites
Kim, Jihong
Cho, Jang-Hoon
Lee, Hyung-Man
Hong, Sung-Min
SENSORS, 2021, 21 (06) : 1 - 11
[6] Flexible Tactile Sensor Arrays With Capacitive and Resistive Dual-Mode Transduction
Meng, Hailiang
Shi, Yixiao
Pan, Junjie
Bao, Guanjun
IEEE SENSORS JOURNAL, 2024, 24 (10) : 15892 - 15899
[7] A Capacitive Humidity Sensor for Low-cost Low-power Application
Wu, Xiang
Deng, Fangming
MECHATRONICS ENGINEERING, COMPUTING AND INFORMATION TECHNOLOGY, 2014, 556-562 : 1847 - 1851
[8] Moisture content measurement for plant material powder based on capacitive humidity sensor
Faculty of Modern Agricultural Engineering, Kunming University of Science and Technology, Kunming 650500, China
Nongye Jixie Xuebao, 2012, 6 (174-177): : 174 - 177
[9] Strip-type flexible capacitive humidity sensor based on composite of polyimide and poly(glycidyl methacrylate): Fabrication, humidity sensitive performance and potential for detecting water content in liquids
Zhao, Huijie
Han, Kaiyue
Li, Yang
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2023, 675
[10] Pt decorated MoS2 nanoflakes for ultrasensitive resistive humidity sensor
Burman, Debasree
Santra, Sumita
Pramanik, Panchanan
Guha, Prasanta Kumar
NANOTECHNOLOGY, 2018, 29 (11)

← 1 2 3 4 →