Flat-top profile of an excimer-laser beam generated using beam-splitter gratings

被引：26

作者：

Kajava, T.

Hakola, A.

Elfstrom, H.

Simonen, J.

Paakkonen, P.

Turunen, J.

机构：

[1] Helsinki Univ Technol, Dept Engn Math & Phys, FI-02015 Helsinki, Finland

[2] Univ Joensuu, Dept Phys, FI-80101 Joensuu, Finland

来源：

OPTICS COMMUNICATIONS | 2006年 / 268卷 / 02期

基金：

芬兰科学院;

关键词：

flat-top beam; excimer laser; diffractive optics; pulsed laser deposition;

D O I：

10.1016/j.optcom.2006.07.030

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a simple solution to the beam-shaping problem in which a wide, typically rectangular spatial distribution of an excimerlaser beam should be transformed into a flat-top distribution, a few millimeters wide in both directions. The set-up can be made practically lossless and it allows the energy density of the pulse to be increased by a factor of 50. The method finds use, e.g., in pulsed laser deposition, UV lithography and micro machining. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：289 / 293

页数：5

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