DESIGN, FABRICATION, AND CHARACTERIZATION OF LATERAL-STRUCTURED CU-NI THERMOELECTRIC DEVICES

被引:0
|
作者
Selvan, Krishna Veni [1 ]
Ali, Mohamed Sultan Mohamed [1 ]
机构
[1] Univ Teknol Malaysia, Fac Elect Engn, Skudai 81310, Johor, Malaysia
来源
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2018年
关键词
FLEXIBLE THERMOPILE; HUMAN-BODY; GENERATOR; ENERGY;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work reports a simple lateral-structured thermoelectric devices using copper (Cu) and nickel (Ni) thermolegs. The approach includes the usage of low cost photolithography and without the needs of Cu deposition, leading to much easier and faster fabrication. The lateral device structure has never been implemented into any Cu-Ni devices to date. Investigations on variating the thermoleg's width (w) and length (1) realizes 5.72 mu W at optimized design, possessing w and / of 1000 mu W and 20 mm respectively. Moreover, the lateral structure presented in this work has generated larger power by 2.79 improvement factor than the previous vertically-structured device.
引用
收藏
页码:665 / 668
页数:4
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