RF deposition of soft hydrogenated amorphous carbon coatings for adhesive interfaces on highly elastic polymer materials

被引：18

作者：

Lackner, Juergen M. ^{[1
]}

Major, Roman ^{[1
,2
]}

Major, Lukasz ^{[2
]}

Schoeberl, Thomas ^{[3
]}

Waldhauser, Wolfgang ^{[1
]}

机构：

[1] JOANNEUM RESEARCH Forsch mbH, Laser Ctr Leoben, A-8712 Niklasdorf, Austria

[2] Polish Acad Sci, Inst Met & Mat Sci, PL-30059 Krakow, Poland

[3] Austrian Acad Sci, Erich Schmid Inst, A-8700 Leoben, Austria

来源：

SURFACE & COATINGS TECHNOLOGY | 2009年 / 203卷 / 16期

关键词：

Polymer-like carbon; RF deposition; Elastic coating; a-C:H; A-C-H; DIAMOND-LIKE CARBON; MECHANICAL-PROPERTIES; FILMS; PLASMA; RAMAN; PHOTOLUMINESCENCE;

D O I：

10.1016/j.surfcoat.2009.02.012

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Developing soft and elastic coating materials is one of the future challenges in research on new coating materials for vacuum deposition processes. This development direction is in its infancy and fully contrary to the thin film research mainstream. Such coatings - tailor-made with gradients in hardness and elastic modulus - could work as adhesive and load-supporting layers on polymers bridging the properties from soft substrate to the stiff, wear-resistant hard top coating. In this work we used the approach of a chemical vapour deposition process with plasma assistance from an unbalanced RF (13.56 MHz) powered magnetron sputtering cathode in planar parallel plate arrangement. The characterization of the amorphous hydrogenated and polymer-like carbon films showed a high influence of the used precursor gas (acetylene, butane) on hardness and elasticity. The elastic moduli were found to be between 2 and 35 GPa for the fully amorphous films with a-C:H structure. Specific growth structures were found in HR-TEM imaging of the amorphous coatings. All coatings adhere strongly on a rubber-like polymer (thermoplastic polyurethane). (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：2243 / 2248

页数：6

共 28 条

[1]

ANGUS JC, 1986, PLASMA DEPOSITED THI, V89

[2]

*ASMEC, 2006, SOFTW PACK EL 3 0

[3]

BOENIG HV, 1982, PLASMA SCI TECHNOLOG, V75

[4] Microstructural analysis of hard amorphous carbon films deposited with high-energy ion beams [J].

Brusa, RS ;

Somoza, A ;

Huck, H ;

Tiengo, N ;

Karwasz, GP ;

Zecca, A ;

Reinoso, M ;

Halac, EB .

APPLIED SURFACE SCIENCE, 1999, 150 (1-4) :202-210

[5] Production and characterization of hydrogenated amorphous carbon thin films deposited in methane plasmas diluted by noble gases [J].

Capote, G ;

Freire, FL .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 112 (2-3) :101-105

[6] Photoluminescence and Raman studies of hydrogenated amorphous carbon films deposited by the rf plasma-enhanced CVD method [J].

Chen, CL ;

Lue, JT .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 194 (1-2) :93-102

[7] Effect of annealing on the structural and electrical properties of d.c. multipolar plasma deposited a-C:H films [J].

Clin, M ;

Benlahsen, M ;

Zeinert, A ;

Zellama, K ;

Naud, C .

THIN SOLID FILMS, 2000, 372 (1-2) :60-69

[8] RF PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION OF DIAMOND-LIKE CARBON - PHYSICAL AND MECHANICAL-PROPERTIES [J].

DEKEMPENEER, EHA ;

JACOBS, R ;

SMEETS, J ;

MENEVE, J ;

EERSELS, L ;

BLANPAIN, B ;

ROOS, J ;

OOSTRA, DJ .

THIN SOLID FILMS, 1992, 217 (1-2) :56-61

[9] Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond [J].

Ferrari, AC ;

Robertson, J .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2004, 362 (1824) :2477-2512

[10] Resonant Raman spectroscopy of disordered, amorphous, and diamondlike carbon [J].

Ferrari, AC ;

Robertson, J .

PHYSICAL REVIEW B, 2001, 64 (07)

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