Structure of platinum coatings obtained by chemical vapor deposition

被引:10
作者
Gelfond, N. V. [1 ]
Krisyk, V. V. [1 ]
Dorovskikh, S. I. [1 ]
Kal'nyi, D. B. [1 ,2 ]
Maksimovskii, E. A. [1 ]
Shubin, Yu. V. [1 ,2 ]
Trubin, S. V. [1 ]
Morozova, N. B. [1 ]
机构
[1] Russian Acad Sci, Siberian Branch, Nikolaev Inst Inorgan Chem, Novosibirsk, Russia
[2] Novosibirsk Natl Res State Univ, Novosibirsk, Russia
关键词
platinum coatings; MOCVD; platinum(II) bis(acetylacetonate); pacemaker cathodes and anodes; THIN-FILMS;
D O I
10.1134/S0022476615060347
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
To the best of our knowledge, it is the first time that the method of chemical vapor deposition (MOCVD) with platinum(II) bis(acetylacetonate) (Pt(acac)(2)) is used to obtain platinum coatings on the cathodes and anodes of the electrodes for pacemakers. The deposition processes are carried out under reduced pressure in the presence of oxygen. The phase and elemental composition, structure, and morphology of the coatings are examined by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and energy dispersive spectroscopy (EDS). Platinum coatings with a columnar structure are prepared in the temperature range 280-340A degrees C. An increase in the deposition temperature leads to a change in the structure of the coatings and reduction in their thickness. Cyclic voltammetry (CV) is used to estimate the specific capacities of the platinum coatings on the cathodes and anodes, the maximum values of which are 426 mC/cm(2) and 1160 mC/cm(2), respectively.
引用
收藏
页码:1215 / 1219
页数:5
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