A hybrid humidity sensor using optical waveguides on a quartz crystal microbalance

被引：16

作者：

Shinbo, Kazunari ^{[1
,2
]}

Otuki, Shunya ^{[1
]}

Kanbayashi, Yuichi ^{[1
]}

Ohdaira, Yasuo ^{[1
,2
]}

Baba, Akira ^{[2
]}

Kato, Keizo ^{[1
,2
]}

Kaneko, Futao ^{[1
,2
]}

Miyadera, Nobuo ^{[3
]}

机构：

[1] Niigata Univ, Grad Sch Sci & Technol, Nishi Ku, Niigata 9502181, Japan

[2] Niigata Univ, Interdisciplinary Res Ctr, Nishi Ku, Niigata 9502181, Japan

[3] Hitachi Chem Co Ltd, Tsukuba, Ibaraki 3004247, Japan

来源：

THIN SOLID FILMS | 2009年 / 518卷 / 02期

关键词：

Optical waveguide spectroscopy; Quartz crystal microbalance; Hybrid sensor; Cobalt (II) chloride; Chromism; SURFACE-PLASMON RESONANCE; METHYLENE-BLUE;

D O I：

10.1016/j.tsf.2009.07.059

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, stab and ridge optical waveguides (OWGs) made of fluorinated polyimides were deposited on a quartz crystal microbalance (QCM), and hybrid sensors using OWG spectroscopy and the QCM technique were prepared. Polyvinyl alcohol (PVA) film with CoCl2 was deposited on the OWGs, and the characteristics of humidity sensing were investigated. A prism coupler was used to enter a He-Ne laser beam (lambda = 632.8 nm) to the slab OWG. The output light intensity markedly changed due to chromism of the CoCl2 as a result of humidity sorption, and this change was dependent on the incident angle of the laser beam to the slab OWG. During the measurement of output light, the QCM frequency was simultaneously monitored. The humidity dependence of the sensor with the slab OWG was also investigated in the range from 15 to 85%. For the sensor with the ridge OWG, white light was entered by butt-coupling, and the characteristics of humidity sensing were investigated by observing the output light spectrum and the QCM frequency. (C) 2009 Published by Elsevier B.V.

引用

页码：629 / 633

页数：5

共 16 条

[1]

Bailey LE, 2002, LANGMUIR, V18, P479, DOI 10.1021/1a0112716

[2] LONG-TERM OPERATION OF CRYSTAL OSCILLATORS IN THIN-FILM DEPOSITION [J].