Absolute measurement of surface profiles in phase-shifting projected fringe profilometry

被引:5
|
作者
Liu, HY [1 ]
Bard, B [1 ]
Lu, GW [1 ]
Wu, SD [1 ]
机构
[1] Penn State Univ, Appl Res Lab, University Pk, PA 16803 USA
来源
OPTICAL MANUFACTURING AND TESTING III | 1999年 / 3782卷
关键词
phase-shifting projected fringe method; system calibration; and absolute profile measurement;
D O I
10.1117/12.369194
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Phase-shifting projected fringe profilometry (PSPFP) is a powerful tool in the profile inspection of a large variety of rough surfaces. In many applications, absolute PSPFP measurements, capable of compensating for the lateral distortions in the measured object shape and providing an expression of the measured shape under a predefined reference system, are highly desired. In this paper, an absolute PSPFP technique combining the lateral calibration and the phase-to-depth calibration is proposed. The principles of the proposed absolute PSPFP measurement technique will be discussed together with the calibration and measurement methods based on a particular formalism of absolute PSPFP measurements.
引用
收藏
页码:283 / 290
页数:4
相关论文
共 50 条
  • [1] Calibration-based phase-shifting projected fringe profilometry for accurate absolute 3D surface profile measurement
    Liu, HY
    Su, WH
    Reichard, K
    Yin, SZ
    OPTICS COMMUNICATIONS, 2003, 216 (1-3) : 65 - 80
  • [2] Phase-shifting projected fringe profilometry by binary-encoded projections
    Su, Wei -Hung
    Cheng, Nai-Jen
    PHOTONIC FIBER AND CRYSTAL DEVICES: ADVANCES IN MATERIALS AND INNOVATIONS IN DEVICE APPLICATIONS XVI, 2022, 12229
  • [3] Pulsed-encoded pattern projections for phase-shifting projected fringe profilometry
    Su, Wei-Hung
    Chen, Sih-Yue
    PHOTONIC FIBER AND CRYSTAL DEVICES: ADVANCES IN MATERIALS AND INNOVATIONS IN DEVICE APPLICATIONS XIV, 2020, 11498
  • [4] Phase-Shifting Projected Fringe Profilometry Using Binary-Encoded Patterns
    Cheng, Nai-Jen
    Su, Wei-Hung
    PHOTONICS, 2021, 8 (09)
  • [5] Phase-shifting projected fringe profilometry using the phase-wedged encoding algorithm
    Su, Wei-Hung
    Yu, Yeh-Wei
    Sun, Ching-Cherng
    PHOTONIC FIBER AND CRYSTAL DEVICES: ADVANCES IN MATERIALS AND INNOVATIONS IN DEVICE APPLICATIONS XVIII, 2024, 13140
  • [6] Phase-shifting projected fringe profilometry using ternary-encoded patterns
    Chen, Sih-Yue
    Cheng, Nai-Jen
    Su, Wei-Hung
    PHOTONIC FIBER AND CRYSTAL DEVICES: ADVANCES IN MATERIALS AND INNOVATIONS IN DEVICE APPLICATIONS XI, 2017, 10382
  • [7] Fiber interferometric fringe phase-shifting for internal surface profilometry
    Lv, DF
    Ding, ZL
    Yuan, F
    PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2, 2004, : 821 - 826
  • [8] Shape defect measurement by fringe projection profilometry and phase-shifting algorithms
    Ordones, Sotero
    Servin, Manuel
    Padilla, Moises
    Choque, Ivan
    Flores, Jorge L.
    Munoz, Antonio
    OPTICAL ENGINEERING, 2020, 59 (01)
  • [9] Regional fringe analysis for improving depth measurement in phase-shifting fringe projection profilometry
    Chien, Kuang-Che Chang
    Tu, Han-Yen
    Hsieh, Ching-Huang
    Cheng, Chau-Jern
    Chang, Chun-Yen
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2018, 29 (01)
  • [10] Phase deviation analysis and phase retrieval for partial intensity saturation in phase-shifting projected fringe profilometry
    Chen, Yanming
    He, Yuming
    Hu, Eryi
    OPTICS COMMUNICATIONS, 2008, 281 (11) : 3087 - 3090