Influence of Scaling and Emitter Layout on the Thermal Behavior of Toward-THz SiGe:C HBTs

被引:28
作者
d'Alessandro, Vincenzo [1 ]
Sasso, Grazia [1 ]
Rinaldi, Niccolo [1 ]
Aufinger, Klaus [2 ]
机构
[1] Univ Naples Federico II, Dept Elect Engn & Informat Technol, I-80125 Naples, Italy
[2] Infineon Technol AG, D-85579 Neubiberg, Germany
关键词
Heterojunction bipolar transistor (HBT); scaling; self-heating (SH); silicon germanium; thermal resistance; BIPOLAR-TRANSISTORS; RESISTANCE; BICMOS;
D O I
10.1109/TED.2014.2349792
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An extensive on-wafer experimental campaign is carried out to determine the thermal resistance dependence on scaling and emitter geometry in state-of-the-art toward-THz silicon-germanium bipolar transistors designed and fabricated within the framework of the European DOTFIVE project. The extraction is performed through a robust procedure which-differently from classic approaches-exploits an accurately calibrated thermometer relating base-emitter voltage to junction temperature. Experimental data are then used to assess the accuracy of scalable thermal resistance laws for advanced transistor models; it was found that at least four parameters are needed to ensure a favorable agreement over wide ranges of emitter widths and lengths.
引用
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页码:3386 / 3394
页数:9
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