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Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instruments, Beijing 100084, Peoples R China
Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instruments, Beijing 100084, Peoples R China