Interface morphology and electrical properties of bonded GaAs/GaAs wafers at different temperatures

被引：0

作者：

Chang, S. C. ^{[1
]}

Wu, Y. S. ^{[1
]}

Chang, N. ^{[2
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan

[2] Elect Testing Ctr, Taoyuan 33383, Taiwan

来源：

SEMICONDUCTOR WAFER BONDING 12: SCIENCE, TECHNOLOGY, AND APPLICATIONS | 2012年 / 50卷 / 07期

关键词：

SOLAR-CELLS; GAAS; SI;

D O I：

10.1149/05007.0109ecst

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The microstructure and electrical properties of p-GaAs/n-GaAs bonded interface were investigated. It was observed that when bonding temperature increased from 600 to 800 degrees C, the thickness of oxide layer decreased. Current-voltage characteristic shows typical diode behaviors in these temperature ranges.

引用

页码：109 / 112

页数：4

共 7 条

[1] High-quality thin film GaAs bonded to Si using SeS2 -: A new approach for high-efficiency tandem solar cells
Arokiaraj, J
Okui, H
Taguchi, H
Soga, T
Jimbo, T
Umeno, M
[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2001, 66 (1-4) : 607 - 614
[2] Wafer bonding by Ni-induced crystallization of amorphous silicon
Chao, CP
Wu, YCS
Lee, TL
Wang, YH
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (9A): : 5527 - 5530
[3] Direct wafer bonded abrupt junction tunnel diodes
Esser, RH
Hobart, KD
Kub, FJ
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2004, 151 (06) : G387 - G390
[4] Effects of annealing temperature on electrical resistance of bonded n-GaAs wafers
Liu, PC
Lu, CL
Wu, YCS
Cheng, JH
Ouyang, H
[J]. APPLIED PHYSICS LETTERS, 2004, 85 (21) : 4831 - 4833
[5] Thermal performance of Si and GaAs based solar cells and modules: a review
Radziemska, E
[J]. PROGRESS IN ENERGY AND COMBUSTION SCIENCE, 2003, 29 (05) : 407 - 424
[6] High-temperature healing of interfacial voids in GaAs wafer bonding
Wu, YCS
Liu, PC
Feigelson, RS
Route, RK
[J]. JOURNAL OF APPLIED PHYSICS, 2002, 91 (04) : 1973 - 1977
[7] Improved GaAs bonding process for quasi-phase-matched second harmonic generation
Wu, YS
Feigelson, RS
Route, RK
Zheng, D
Gordon, LA
Fejer, MM
Byer, RL
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (01) : 366 - 371

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