Preparation and characterization of Ba2TiSi2O8 ferroelectric films produced by sol-gel method

被引：17
|
作者：
Dai, WK
Zhu, MK
Hou, YD
Wang, H
Yan, H
Shao, MM
Chen, XY
Xu, JB
机构：
[1] Beijing Univ Technol, Inst Mat Sci & Engn, Key Lab Adv Funct Mat, Beijing 100022, Peoples R China
[2] Beijing Changfeng Surface Acoust Wave Device Corp, Beijing 100891, Peoples R China
[3] CUHK, Dept Elect Engn, Shatin, Hong Kong, Peoples R China
来源：
MATERIALS LETTERS | 2004年 / 58卷 / 22-23期
基金：
中国国家自然科学基金;
关键词：
fresnoite; Ba2TiSi2O8; thin film; sol-gel; crystallization;
D O I：
10.1016/j.matlet.2004.05.021
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Fresnoite (Ba2TiSi2O8, BTS) thin films were grown on polished Si(100) substrates by sol-gel method. The films were characterized using Fourier transform infrared spectroscopy (FTIR), Raman scattering spectroscopy, X-ray diffraction (XRD) and atom force microscopy (AFM). The results reveal that the crystallinity of fresnoite thin films increases and their structures become more compact as post-annealing temperature increases. Combined with XRD data, the strong FTIR peaks and Raman bands assigned to Ti-O and Si-O vibration indicate the formation of fresnoite phase in the films at a temperature of 750 degreesC. Besides, the AFM observation showed the films have a smooth surface, fine grains and dense structure. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：2927 / 2931
页数：5
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