Preparation and characterization of Ba2TiSi2O8 ferroelectric films produced by sol-gel method

被引：17

作者：

Dai, WK

Zhu, MK

Hou, YD

Wang, H

Yan, H

Shao, MM

Chen, XY

Xu, JB

机构：

[1] Beijing Univ Technol, Inst Mat Sci & Engn, Key Lab Adv Funct Mat, Beijing 100022, Peoples R China

[2] Beijing Changfeng Surface Acoust Wave Device Corp, Beijing 100891, Peoples R China

[3] CUHK, Dept Elect Engn, Shatin, Hong Kong, Peoples R China

来源：

MATERIALS LETTERS | 2004年 / 58卷 / 22-23期

基金：

中国国家自然科学基金;

关键词：

fresnoite; Ba2TiSi2O8; thin film; sol-gel; crystallization;

D O I：

10.1016/j.matlet.2004.05.021

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fresnoite (Ba2TiSi2O8, BTS) thin films were grown on polished Si(100) substrates by sol-gel method. The films were characterized using Fourier transform infrared spectroscopy (FTIR), Raman scattering spectroscopy, X-ray diffraction (XRD) and atom force microscopy (AFM). The results reveal that the crystallinity of fresnoite thin films increases and their structures become more compact as post-annealing temperature increases. Combined with XRD data, the strong FTIR peaks and Raman bands assigned to Ti-O and Si-O vibration indicate the formation of fresnoite phase in the films at a temperature of 750 degreesC. Besides, the AFM observation showed the films have a smooth surface, fine grains and dense structure. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：2927 / 2931

页数：5

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