Piezoelectric cantilever beams actuated by PZT sol-gel thin film

被引：71
|
作者：
Luginbuhl, P
Racine, GA
Lerch, P
Romanowicz, B
Brooks, KG
deRooij, NF
Renaud, P
机构：
[1] ECOLE POLYTECH FED LAUSANNE,INST MICROTECHNOL,CH-1015 LAUSANNE,SWITZERLAND
[2] UNIV NEUCHATEL,LAB CERAM,CH-2000 NEUCHATEL,SWITZERLAND
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期
关键词：
lead zirconium titanate; piezoelectric cantilevers; sol-gel;
D O I：
10.1016/S0924-4247(95)01196-X
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The mechanical response of piezoelectric cantilever beams actuated by sol-gel-derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflection of the beams with a standard interferometry method. Interferometric displacement measurements, electrical measurements and finite-element simulations are reported to determine the piezoelectric coefficient d(31) of the PZT thin film.
引用
收藏
页码：530 / 535
页数：6
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