High sensitive micro touch sensor with piezoelectric thin film for micro pipetting works under microscope

被引:12
作者
Arai, F [1 ]
Motoo, K [1 ]
Fukuda, T [1 ]
Katsuragi, T [1 ]
机构
[1] Nagoya Univ, Dept Micro Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源
2004 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1- 5, PROCEEDINGS | 2004年
关键词
component; touch sensor; micromanipulation; PZT; vibration-type sensor; hydrothermal method; microbe; separation;
D O I
10.1109/ROBOT.2004.1308012
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Isolation and separation of the target microbe is quite important. We propose a new touch sensor for separation of the target microbe on the plate using a micromanipulator with the glass pipette. Principle of this touch sensor is based on detection of mechanical impedance change after contact of the vibrating pipette tip with the plate. We improved the fixation method of the sensor with the pipette as well as electrode design of the sensor. We performed the FEM analysis to improve sensitivity of this sensor. The prototype sensor has high sensitivity and high rigidity and is excellent in durability. This sensor is sensitive enough to protect the fragile pipette tip from abrupt collision. Thus, separation task of the microbe by the micromanipulator under the microscope is improved.
引用
收藏
页码:1352 / 1357
页数:6
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