Practical phase unwrapping of interferometric fringes based on unscented Kalman filter technique

被引:60
作者
Cheng, Zhongtao [1 ]
Liu, Dong [1 ]
Yang, Yongying [1 ]
Ling, Tong [1 ]
Chen, Xiaoyu [1 ]
Zhang, Lei [1 ]
Bai, Jian [1 ]
Shen, Yibing [1 ]
Miao, Liang [2 ]
Huang, Wei [2 ]
机构
[1] Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China
[2] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Changchun 130033, Jilin, Peoples R China
基金
高等学校博士学科点专项科研基金; 中国国家自然科学基金;
关键词
INTERFERENCE-FRINGES; INTERFEROGRAM; DEMODULATION; SURFACES;
D O I
10.1364/OE.23.032337
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A phase unwrapping algorithm for interferometric fringes based on the unscented Kalman filter (UKF) technique is proposed. The algorithm can bring about accurate phase unwrapping and good noise suppression simultaneously by incorporating the true phase and its derivative in the state vector estimation through the UKF process. Simulations indicate that the proposed algorithm has better accuracy than some widely employed phase unwrapping approaches in the same noise condition. Also, the time consumption of the algorithm is reasonably acceptable. Applications of the algorithm in our different optical interferometer systems are provided to demonstrate its practicability with good performance. We hope this algorithm can be a practical approach that can help to reduce the systematic errors significantly induced by phase unwrapping process for interferometric measurements such as wavefront distortion testing, surface figure testing of optics, etc. (C) 2015 Optical Society of America
引用
收藏
页码:32337 / 32349
页数:13
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