Bias effects on structure and piezoresistive properties of DLC:Ag thin films

被引：29

作者：

Meskinis, S. ^{[1
]}

Vasiliauskas, A. ^{[1
]}

Slapikas, K. ^{[1
]}

Gudaitis, R. ^{[1
]}

Andrulevicius, M. ^{[1
]}

Ciegis, A. ^{[1
]}

Niaura, G. ^{[2
]}

Kondrotas, R. ^{[2
]}

Tamulevicius, S. ^{[1
]}

机构：

[1] Kaunas Univ Technol, Inst Mat Sci, LT-50131 Kaunas, Lithuania

[2] Ctr Phys Sci & Technol, Inst Chem, LT-01108 Vilnius, Lithuania

来源：

SURFACE & COATINGS TECHNOLOGY | 2014年 / 255卷

关键词：

Silver containing diamond like carbon (DLC:Ag) films; Substrate bias effects; Piezoresistive properties; Multiwavelength Raman spectroscopy; X-ray photoelectron spectroscopy; XRD; DIAMOND-LIKE CARBON; RAMAN-SPECTROSCOPY; AMORPHOUS-CARBON; NANOCOMPOSITE COATINGS; MECHANICAL-PROPERTIES; COMPOSITE FILMS; CVD TECHNIQUE; SILVER; DEPOSITION; NANOPARTICLES;

D O I：

10.1016/j.surfcoat.2014.01.026

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In present study silver containing diamond like carbon (DLC:Ag) films deposited by reactive unbalanced magnetron sputtering of silver target in argon and acetylene gas ambient were investigated. Structure of the deposited films was studied by multiwavelength Raman spectroscopy, and chemical composition by X-ray photoelectron spectroscopy (XPS). The X-ray diffraction (XRD) as well as transmission electron microscopy was employed in the analysis of films. The effects of the substrate bias on structure, chemical composition and piezoresistive properties of DLC:Ag films were investigated. Silver and oxygen atomic concentrations in the DLC:Ag films decreased with the increase of the negative substrate bias. Relationship between the structure of DLC:Ag films and substrate bias was observed, too. Dependence of the piezoresistive gauge factor of DLC:Ag films on the substrate bias was resonance type with the highest gauge factor values observed in 50-100 V negative voltages range. It was found that gauge factor of the DLC:Ag films is related both with structure of the diamond like carbon matrix and silver atomic concentration and size of the silver clusters in the deposited films. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：84 / 89

页数：6

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