ToF-SIMS characterisation of methane- and hydrogen-plasma-modified graphite using principal component analysis

Time of flight secondary ion mass spectrometry (ToF-SIMS) has been used to determine the extent of surface modification of highly ordered pyrolytic graphite (HOPG) samples that were exposed to radio-frequency methane and hydrogen plasmas. The ToF-SIMS measurements were examined with the multivariate method of principal component analysis (PCA), to maximise the amount of spectral information retained in the analysis. This revealed that the plasma (methane or hydrogen plasma) modified HOPG exhibited greater hydrogen content than the pristine HOPG. The hydrogen content trends observed from the ToF-SIMS studies were also observed in elastic recoil detection analysis measurements. The application of the ToF-SIMS PCA method also showed that small hydrocarbon fragments were sputtered from the hydrogen-plasma-treated sample, characteristic of the formation of a plasma-damaged surface, whereas the methane-plasma-treated surface sputtered larger hydrocarbon fragments, which implies the growth of a polymer-like coating. Scanning tunnelling microscopy measurements of the modified surfaces showed surface features that are attributable to either etching or film growth after exposure to the hydrogen or methane plasma. Copyright (C) 2009 John Wiley & Sons, Ltd.