Kinetic model for electric-field induced point defect redistribution near semiconductor surfaces

被引:13
|
作者
Gorai, Prashun [1 ]
Seebauer, Edmund G. [1 ]
机构
[1] Univ Illinois, Dept Chem & Biomol Engn, Urbana, IL 61801 USA
基金
美国国家科学基金会;
关键词
TITANIUM-DIOXIDE; CHARGE; SEGREGATION; BOUNDARIES; DIFFUSION; OXIDE;
D O I
10.1063/1.4890472
中图分类号
O59 [应用物理学];
学科分类号
摘要
The spatial distribution of point defects near semiconductor surfaces affects the efficiency of devices. Near-surface band bending generates electric fields that influence the spatial redistribution of charged mobile defects that exchange infrequently with the lattice, as recently demonstrated for pile-up of isotopic oxygen near rutile TiO2 (110). The present work derives a mathematical model to describe such redistribution and establishes its temporal dependence on defect injection rate and band bending. The model shows that band bending of only a few meV induces significant redistribution, and that the direction of the electric field governs formation of either a valley or a pile-up. (C) 2014 AIP Publishing LLC.
引用
收藏
页数:5
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