Carbon-plasma produced in vacuum by 532 nm-3 ns laser pulses ablation

被引:42
作者
Torrisi, L. [1 ]
Caridi, F. [1 ]
Margarone, D. [1 ]
Picciotto, A. [1 ]
Mangione, A. [1 ]
Beltrano, J. J. [1 ]
机构
[1] Univ Messina, Dipartimento Fis, Ist Nazl Fis Nucl, Lab Nazl Sud, Catania, Italy
关键词
laser ablation; carbon plasma; plasma temperature;
D O I
10.1016/j.apsusc.2006.01.042
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A study of VIS laser ablation of graphite, in vacuum, by using 3 ns Nd:YAG laser radiation is reported. Nanosecond pulsed ablation gives an emission mass spectrum attributable to C-n neutral and charged particles. Mass quadrupole spectroscopy, associated to electrostatic ion deflection, allows estimation of the velocity distributions of several of these emitting species within the plume as a function of the incident laser fluence. Time gated plume imaging and microscopy measurements have been used to study the plasma composition and the deposition of thin carbon films. The multi-component structure of the plume emission is rationalized in terms of charge state, ions temperature and neutrals temperature. A special regard is given to the ion acceleration process occurring inside the plasma due to the high electrical field generated in the non-equilibrium plasma conditions. The use of nanosecond laser pulses, at fluences below 10 J/cm(2), produces interesting C-atomic emission effects, as a high ablation yield, a high fractional ionization of the plasma and presence of nanostructures deposited on near substrates. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:6383 / 6389
页数:7
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