Optical properties of molybdenum oxide thin films deposited by chemical vapor transport of MoO3(OH)2

被引:0
作者
Lee, Young Jung [1 ]
Jeon, Hee Young [1 ]
Park, Chang Won [1 ]
Kim, Dae-Gun [1 ]
Do Kim, Young [1 ]
机构
[1] Hanyang Univ, Div Mat Sci & Engn, Seoul 133791, South Korea
来源
TMS 2009 138TH ANNUAL MEETING & EXHIBITION - SUPPLEMENTAL PROCEEDINGS, VOL 3: GENERAL PAPER SELECTIONS | 2009年
关键词
Molybdenum oxide; Hydrogen reduction; Chemical vapor transport; Optical property; Electrochromic property; ELECTROCHROMIC PROPERTIES; HYDROGEN-REDUCTION; MOO3; BEHAVIOR; CU;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
MoO3 thin film is useful for the optical devices due to its electrochromic properties. In this study, MoO2 thin film was successfully deposited by the chemical vapor transport (CVT) of the volatile MoO3(OH)(2) and subsequently, MoO3 thin film was obtained through the annealing of the deposited MoO2 thin film at 400 degrees C in O-2 atmosphere. The optical transmittance increased and absorbance peak were broadened and red-shifted as the annealing time increased reducing oxygen deficiency. CVT technique could be applied the one of technique for the deposition of molybdenum oxides thin film.
引用
收藏
页码:27 / 32
页数:6
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