760 nm high-performance VCSEL growth and characterization

被引：0

作者：

Rinaldi, Fernando ^{[1
]}

Ostermann, Johannes M. ^{[1
]}

Kroner, Andrea ^{[1
]}

Riedl, Michael C. ^{[1
]}

Michalzik, Rainer ^{[1
]}

机构：

[1] Univ Ulm, Optoelect Dept, D-89069 Ulm, Germany

来源：

MICRO-OPTICS, VCSELS, AND PHOTONIC INTERCONNECTS II: FABRICATION, PACKAGING, AND INTEGRATION | 2006年 / 6185卷

关键词：

VCSEL; spectroscopy; 760; nm; oxygen sensing; single-mode; optical gratings; polarization control;

D O I：

10.1117/12.662839

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High-performance vertical-cavity surface-emitting lasers (VCSELs) with an emission wavelength of approximately 764 nm are demonstrated. This wavelength is very attractive for oxygen sensing. Low threshold currents., high optical output power, single-mode operation, and stable polarization are obtained. Using the surface relief technique and in particular the grating relief technique, we have increased the single-mode output power to more than 2.5 mW averaged over a large device quantity. The laser structure was grown by molecular beam epitaxy (MBE) on GaAs (100)-oriented substrates. The devices are entirely based on the AlGaAs mixed compound semiconductor material system. The growth process, the investigations of the epitaxial material together with the device fabrication and characterization are discussed in detail.

引用

页数：7