FABRICATION OF A HIGH TEMPERATURE-RESISTANCE OPTICAL FIBRE MICRO PRESSURE SENSOR

被引：0

作者：

Bremer, K. ^{[1
]}

Lewis, E. ^{[1
]}

Moss, B. ^{[1
]}

Leen, G. ^{[2
]}

Lochmann, S. ^{[3
]}

Mueller, I. ^{[3
]}

机构：

[1] Univ Limerick, OFSRC, Limerick, Ireland

[2] Univ Limerick, Circuits & Syst Res Ctr, Limerick, Ireland

[3] Hsch Wismar, Dept Elect Engn & Comp Sci, Wismar, Germany

来源：

2009 6TH INTERNATIONAL MULTI-CONFERENCE ON SYSTEMS, SIGNALS AND DEVICES, VOLS 1 AND 2 | 2009年

基金：

爱尔兰科学基金会;

关键词：

Fabry-Perot Interferometer; Optical Fibre Sensors; Pressure Measurement; DIAPHRAGM;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A micro diaphragm-based Extrinsic Fabry-Perot Interferometric (EFPI) pressure sensor with high temperature immunity is described. The EFPI pressure sensor consists of a single mode silica glass optical fiber, a glass capillary and a glass diaphragm, which are fused together using a conventional fusion splicer. This eliminates the need for the use of other joining materials, e.g. epoxy, allows any thermal mismatch between different materials to be almost completely eliminated and hence the sensor is capable of high temperature operation. In addition, the EFPI pressure sensor is cheap and relatively easy to produce as only splicing, polishing and wet etching are necessary. Moreover, due to its small size, a frequency response of several MHz can be achieved

引用

页码：895 / +

页数：2

共 12 条

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