Low-loss Si wire waveguides and their application to thermooptic switches

被引：46

作者：

Tsuchizawa, Tai ^{[1
]}

Yamada, Koji ^{[1
]}

Fukuda, Hiroshi ^{[1
]}

Watanabe, Toshifumi ^{[1
]}

Uchiyama, Shingo ^{[1
]}

Itabashi, Seiichi ^{[1
]}

机构：

[1] NTT Corp, Microsyst Integrat Labs, Atsugi, Kanagawa 2430198, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 8B期

关键词：

Si wire waveguide; high refractive-index contrast; spot-size converter; branch; MMI; directional coupler; TO switch;

D O I：

10.1143/JJAP.45.6658

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate low-loss Si wire waveguides with good thermal stability and thermooptic (TO) switches made from them. The propagation losses of the fabricated waveguides were around 2 dB/cm and the coupling losses to an external fiber were 0.4dB. These values were achieved by improving the fabrication process and introducing spot-size converters made from inorganic materials. Using these waveguides, we made two types of TO switches, a I x I switch with a multimode interference (MMI) branch and a 2 x 2 switch with a 3-dB directional coupler. Both switches exhibited a high extinction ratio of more than 30 dB at a low electric power of 30 mW and a switching time shorter than 200 mu s.

引用

页码：6658 / 6662

页数：5

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