Nonlinear static and dynamic responses of an electrically actuated viscoelastic microbeam

被引:38
作者
Fu, Y. M. [1 ]
Zhang, J. [1 ]
机构
[1] Hunan Univ, Coll Mech & Aerosp, Changsha 410082, Hunan, Peoples R China
关键词
MEMS; Viscoelastic microbeam; Nonlinear dynamics; LYAPUNOV EXPONENTS; MEMS; STABILITY; CRITERION; MODEL;
D O I
10.1007/s10409-008-0216-4
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
On the basis of the Euler-Bernoulli hypothesis, nonlinear static and dynamic responses of a viscoelastic microbeam under two kinds of electric forces [a purely direct current (DC) and a combined current composed of a DC and an alternating current] are studied. By using Taylor series expansion, a governing equation of nonlinear integro-differential type is derived, and numerical analyses are performed. When a purely DC is applied, there exist an instantaneous pull-in voltage and a durable pull-in voltage of which the physical meanings are also given, whereas under an applied combined current, the effect of the element relaxation coefficient on the dynamic pull-in phenomenon is observed where the largest Lyapunov exponent is taken as a criterion for the dynamic pull-in instability of viscoelastic microbeams.
引用
收藏
页码:211 / 218
页数:8
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