Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm

Chromatic confocal technology (CCT) is one of the most promising methods for the contactless and accurate measurement of structure profiles. Based on the principles of chromatic dispersion and confocal theory, a dispersion probe is proposed and optimized with several commercial and cheap refractive index lenses. The probe provides 0.3x magnification and a dispersion range of 400 mu m with a commercial LED source with an effective bandwidth of ca. 450-623 nm. Since the noise fluctuation can affect the extraction stability of the focal wavelength, a modification to the centroid peak extraction algorithm is proposed in this paper, where several virtual pixels are interpolated among the real pixels of the spectrometer before thresholding. In addition, a series of experiments were carried out to test the system's displacement measurement performance. The results clearly show that stability is improved by the modified algorithm, and the calibration repeatability is +/- 0.3 mu m in the full measurement range with a linear stage. The standard deviation at the fixed position has an optimal value of 0.009 mu m. The section profile of a Fresnel lens is measured by the CCT system to demonstrate its high feasibility and efficiency.