Photoemission studies of the surfactant-aided growth of Ge on Te-terminated Si(100)

被引:17
作者
Bennett, MR
Dunscombe, CJ
Cafolla, AA
Cairns, JW
Macdonald, JE
Williams, RH
机构
[1] UWCC,DEPT PHYS & ASTRON,CARDIFF CF2 3YB,S GLAM,WALES
[2] DUBLIN CITY UNIV,DEPT APPL PHYS,DUBLIN 11,IRELAND
[3] DEF RES AGCY,MALVERN WR14 3PS,WORCS,ENGLAND
[4] UNIV COLL SWANSEA,SWANSEA SA2 8PP,W GLAM,WALES
关键词
germanium; low energy electron diffraction (LEED); silicon; single crystal epitaxy; soft X-ray photoelectron spectroscopy; surface structure; morphology; roughness; and topography; tellurium; X-ray photoelectron spectroscopy;
D O I
10.1016/S0039-6028(96)01149-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The interactions of Ge adatoms with a Si(100) surface terminated by an ordered layer of Te have been studied in detail using XPS, SXPS. STM and LEED. It has been demonstrated that the Te layer has a surfactant action on the growth mode of the Ge in that the two dimensional growth regime is extended to at least 200 Angstrom and the Te is seen to segregate to the growing Ge surface. The surface reconstruction of the Ge layer changes from (1 x 1) in the initial stages to (2 x 2) as growth proceeds and the surface population of Te is reduced. SXPS line shape analysis has indicated that the initial stages of Ge incorporation are characterised by the formation of small islands above those surface Si sites not fully coordinated with Te. Continued growth of such islands is, however, restricted due to their high surface free energy with respect to the surrounding Te-terminated areas. Ge atoms therefore site-exchange with Te atoms in bridge sites, thus becoming incorporated onto the Si lattice and displacing the Te to bridge sites on the growing surface. in this manner islanding is prevented and two-dimensional growth continues beyond the critical thickness. No evidence is seen for any significant incorporation of the Te within the growing Ge layer. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:178 / 189
页数:12
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