Real time estimation of equivalent cantilever parameters in tapping mode atomic force microscopy

被引：14

作者：

Agarwal, Pranav ^{[1
]}

Salapaka, Murti V. ^{[1
]}

机构：

[1] Univ Minnesota, Dept Elect & Comp Engn, NanoDynam Syst Lab, Twin Cities Minneapolis, MN 55455 USA

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 08期

关键词：

atomic force microscopy; cantilevers;

D O I：

10.1063/1.3206740

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this article, a method of imaging is developed, where during tapping-mode operation, equivalent resonant frequency and quality factor can be obtained in real time. It involves exciting the cantilever near its resonant frequency and two other frequencies chosen close to the resonant frequency. It is shown that changes in equivalent cantilever parameters can be registered for topography changes that are less than 1 nm in height and within 400 mu s of the change occurring. The estimation time is two orders of magnitude better than current techniques.

引用

页数：3

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