Structural and Dielectric Properties of Sputter-Deposited Ba0.48Sr0.52TiO3/LaNiO3 Artificial Superlattice Films

被引:7
作者
Lee, Hsin-Yi [1 ]
Liu, Heng-Jui [1 ]
Liang, Yuan-Chang [2 ]
Wu, Kun-Fu [3 ]
Lee, Chih-Hao [3 ]
机构
[1] Nat Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan
[2] Chien Kuo Technol Univ, Dept Mech Engn, Changhua 500, Taiwan
[3] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 30013, Taiwan
关键词
barium compounds; crystal microstructure; dielectric materials; dielectric thin films; lanthanum compounds; niobium; permittivity; secondary ion mass spectra; sputter deposition; strontium compounds; superlattices; X-ray diffraction; X-ray reflection; X-RAY REFLECTIVITY; (BA; SR)TIO3; THIN-FILMS; CHEMICAL-VAPOR-DEPOSITION; PULSED-LASER DEPOSITION; BATIO3/SRTIO3; SUPERLATTICES; BATIO3/LANIO3; SUPERLATTICE; ELECTRICAL-PROPERTIES; SRTIO3; SUBSTRATE; LAYER THICKNESS; STRAIN;
D O I
10.1149/1.3151928
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Artificial superlattices consisting of dielectric Ba0.48Sr0.52TiO3 (BST) and conductive LaNiO3 (LNO) were fabricated on an Nb-doped SrTiO3(001) single-crystal substrate with radio-frequency magnetron sputtering at temperatures in the range of 500-700 degrees C. A symmetric structure with a sublayer thickness of 3 nm was deposited at varied substrate temperatures; the superlattices contained 10 periods of BST/LNO bilayers. The microstructure of these films was characterized with measurements of X-ray reflectivity and diffraction at high resolution. The formation of a superlattice structure was confirmed through the appearance of both the Bragg peaks separated by Kiessig fringes in X-ray reflectivity curves and the satellite peaks of a (002) diffraction pattern and the secondary-ion mass spectrometry profile. The clearly discernible main feature and satellite features observed in the (002) crystal truncation rod indicate the high quality of the BST/LNO artificial superlattice structure formed on a SrTiO3 substrate at all temperatures of deposition. The higher the temperature of deposition, the smaller the full width at half-maximum of the in-plane rocking curve and the better the crystalline quality. These BST/LNO artificial superlattices show a dielectric constant significantly enhanced relative to the BST single layers of the same effective thickness. Both the lattice strain and the interface quality affect the dielectric properties of the BST/LNO superlattices.
引用
收藏
页码:G114 / G119
页数:6
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