Application of the Kriging method to the reconstruction of ellipsometric signature

The inverse problem in scatterometry which consists in determining the feature shape from an experimental ellipsometric signature is very difficult to solve. on one hand, the problem is ill-posed; on the other hand, due to equipment limitation and the presence of noise in the measurement, the number of experimental signature acquisition is limited to a few measurements. The efficient resolution of the inverse problem requires a more comprehensive signature. To deal with this problem, we use a new approach based on the Kriging interpolation method to enrich the number of usable data. This method is inherently providing the best linear unbiased optimal estimation. (C) 2009 Elsevier B.V. All rights reserved.