Thermal characterisation of micro-hotplates used in sensor structures

被引：31
|
作者：
Fürjes, P
Dücso, C
Adám, M
Zettner, J
Bársony, I
机构：
[1] MFA, Res Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary
[2] Thermosensorik GmbH, Erlangen, Germany
来源：
SUPERLATTICES AND MICROSTRUCTURES | 2004年 / 35卷 / 3-6期
关键词：
calorimetric flow sensor; pellistor; micro-hotplate; thermal analysis;
D O I：
10.1016/j.spmi.2003.09.007
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Micro-hotplates operated at elevated temperature form the basic element in several sensor devices, such as integrated calorimetric or Taguchi-type gas sensors and flow-rate sensors. In all of these applications thermal properties of the sensing elements play a determining role in functional operation, therefore, their accurate characterisation is essential. The micro-hotplates investigated were developed by one side porous silicon micro-machining technology, forming Pt micro-filaments embedded in non-stoichiometric silicon nitride, and suspended across a cavity. This work is dealing with the accurate temperature detection in the micro-scale by different measurement methods for the deduction of steady state and transient thermal properties from the results. Transient properties of the structure were investigated by application of a simplified thermal equivalent circuit model. (C) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码：455 / 464
页数：10
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