Measuring the nose roundness of diamond cutting tools based on atomic force microscopy

被引:13
作者
Li, Z. Q. [1 ]
Sun, T. [1 ]
Li, P. [1 ]
Zhao, X. S. [1 ]
Dong, S. [1 ]
机构
[1] Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Peoples R China
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2009年 / 27卷 / 03期
关键词
atomic force microscopy; cutting tools; diamond;
D O I
10.1116/1.3110011
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The nose roundness is one of the most important indices of lapping quality of circular-arc diamond cutting tools. Because of its special requirements, until now there was no efficient method to measure the nose roundness. In this article, a new way, based on atomic force microscope and precision-revolution axis, to measure the nose arc of tools is proposed. A radius constraint least-squares circle fitting method is put forward. The metrical data are fitted by the nonlinear fitting function Lsqnonlin in software matrix laboratory (MATLAB). Also, the peak-valley value is used to assess the nose roundness. The method fully meets the needs of measurement and evaluation of circular-arc diamond cutting tools' nose roundness.
引用
收藏
页码:1394 / 1398
页数:5
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