Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)

被引：45

作者：

Birol, Hansu ^{[1
]}

Maeder, Thomas ^{[1
]}

Ryser, Peter ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, LPM, CH-1015 Lausanne, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 130卷

关键词：

LTCC; fabrication of microfluidic structures; sacrificial layer; permeability of LTCC;

D O I：

10.1016/j.sna.2005.12.009

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The processing and application of graphite powder-based sacrificial layer for fabrication of microfluidic structures in LTCC is described. Such layers are produced as pastes, which are screen-printed in LTCC sheets to avoid sagging, by supporting closed, three-dimensional structures such as channels, membranes during firing. The aim of the paper is to highlight the selection of paste materials and the effects of processing conditions on the fabricated microfluidic components. It is seen that the complete burnout of graphite powder is the most critical stage as it is in kinetic competition with the open pore-elimination process of LTCC, which occurs at 785 degrees C in our system. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：560 / 567

页数：8

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