Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor

被引：33

作者：

Kim, Yongdae ^{[1
]}

Kim, Sangyoo ^{[2
]}

Park, Kyihwan ^{[1
]}

机构：

[1] Gwangju Inst Sci & Technol, Dept Mechatron, Kwangju 500712, South Korea

[2] Digital Appliance Lab LG Elect, Compressor Grp, Chang Won 641711, Gyeongnam, South Korea

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2009年 / 80卷 / 04期

关键词：

actuators; magnetic forces; nonelectric sensing devices; velocity measurement; vibration isolation; FEEDBACK;

D O I：

10.1063/1.3117462

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A six-axis active vibration isolation system (AVIS) is developed using voice coil actuators. Point contact configuration is employed to have an easy assembly of eight voice coil actuators to an upper and a base plates. The velocity sensor, using an electromagnetic principle that is commonly used in the vibration control, is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. The performances of the AVIS are investigated in the frequency domain and finally validated by comparing with the passive isolation system using the atomic force microscope images.

引用

页数：5

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