Fabrication and optimization of ITO-Ag co-sputtered nanocomposite films as plasmonic materials in the near-infrared region

被引：1

作者：

Chen, Chaonan ^{[1
]}

Ye, Hui ^{[1
]}

机构：

[1] Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, 38 Zheda Rd, Hangzhou 310027, Zhejiang, Peoples R China

来源：

PHOTONIC AND PHONONIC PROPERTIES OF ENGINEERED NANOSTRUCTURES VII | 2017年 / 10112卷

关键词：

Transparent conductive oxides; Ag-ITO co-sputtered films; plasmonic materials; tunable plasmonic properties; INDIUM-TIN-OXIDE;

D O I：

10.1117/12.2251255

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Systematic study of magnetron sputtered silver-indium tin oxide (Ag-ITO) composite films has been carried out by altering the atomic ratio of silver in the co-sputtered films. The optimal micro-structure characteristic with smooth surface and tight junction between silver and ITO particles could be obtained by tuning Ag atomic ratio. Spectroscopic ellipsometry is applied in order to evaluate the plasmonic properties. Real and imaginary permittivity of the films are retrieved utilizing Drude-Lorentz dispersion model. The cross-over wavelength of the films, optimized to as low as around 1130 nm, exhibits high adjustability on the ratio of silver material and RTP process. Much lower imaginary permittivity as well as tunable real permittivity suggest the potentiality of Ag-ITO composite films as substituted plasmonic materials in the near-infrared region.

引用

页数：6

共 25 条

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