Correlation between Plasma OES and Properties of B-doped Diamond Films Grown by MW PE CVD

被引：2

作者：

Belousov, M. E. ^{[1
]}

Krivchenko, V. A. ^{[1
]}

Minakov, P. V. ^{[1
]}

Pal', A. F. ^{[1
]}

Rakhimov, A. T. ^{[1
]}

Suetin, N. V. ^{[1
]}

Sen', V. V. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, DV Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia

来源：

EUROCVD 17 / CVD 17 | 2009年 / 25卷 / 08期

关键词：

BORON;

D O I：

10.1149/1.3207599

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Boron doped polycrystalline diamond films were grown using MW PE CVD technique. Optical emission spectra (OES) of MW-plasma in the region from 200 nm to 800 nm during boron doped polycrystalline diamond films growth were in situ investigated. Raman spectroscopy method was used for structural investigation of grown polycrystalline diamond films. Also, absorption spectroscopy method was used for optical properties investigation of all grown films.

引用

页码：257 / 263

页数：7

共 11 条

[1] RAMAN-SCATTERING OF LASER-DEPOSITED AMORPHOUS-CARBON [J].

BACSA, WS ;

LANNIN, JS ;

PAPPAS, DL ;

CUOMO, JJ .

PHYSICAL REVIEW B, 1993, 47 (16) :10931-10934

[2] AB-INITIO STUDY OF SUBSTITUTIONAL BORON AND THE BORON-HYDROGEN COMPLEX IN DIAMOND [J].

BREUER, SJ ;

BRIDDON, PR .

PHYSICAL REVIEW B, 1994, 49 (15) :10332-10336

[3] Effect of boron incorporation on the structure of polycrystalline diamond films [J].

Brunet, F ;

Deneuville, A ;

Germi, P ;

Pernet, M ;

Gheeraert, E ;

Mambou, J .

[4] Superconductivity in diamond [J].

Ekimov, EA ;

Sidorov, VA ;

Bauer, ED ;

Mel'nik, NN ;

Curro, NJ ;

Thompson, JD ;

Stishov, SM .

NATURE, 2004, 428 (6982) :542-545

[5] Interpretation of Raman spectra of disordered and amorphous carbon [J].

Ferrari, AC ;

Robertson, J .

PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107

[6]

Istvan Pocsik, 1998, J NONCRYSTALLINE SOL, V227-230, P1083

[7]

Jin Nakamura, 2004, PHYS REV B, V70, P1

[8]

Lee K.-W., 2006, PHYS REV B, V73, P1

[9]

Pearse RWB, 1976, The identification of molecular spectra, Vfourth

[10] Characteristics of homoepitaxial heavily boron-doped diamond films from their Raman spectra [J].

Pruvost, F ;

Bustarret, E ;

Deneuville, A .

← 1 2 →