High-Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner With Low Dependence on Incident Angle and Polarization

In this paper, we introduce a single-axis resonant combdrive highly reflective broadband photonic crystal (PC) mirror microelectromechanical systems (MEMS) scanner with low dependence of reflectivity on incident angle and polarization. Two-dimensional PC mirrors have several advantages over metal coatings and dielectric stacks (1-D PCs) as mirrors. They can tolerate much higher processing temperatures and higher incident powers, as well as operate in more corrosive environments than metals. Compared to multilayer dielectric stacks, 2-D PC mirrors are compact and allow for simpler process integration, making them highly compatible with CMOS and MEMS processing. Our PC mirrors show broadband high reflectivity of > 90% in the wavelength range from 1345 to 1490 nm (> 95% for 1380 to 1450 nm) and very low angular and polarization dependence over this same range. The single-axis MEMS scanners are fabricated on silicon-on-insulator wafers with the PC mirrors fabricated in polysilicon films on oxide. Although the scanner presented in this paper is single axis, the low angular and polarization dependence properties of the 2-D-PC mirror also make it useful for dual-axis scanners. The scanners are actuated by in-chip plane electrostatic combdrives on resonance. Dynamic deflection measurements show that the scanners can achieve 20 degrees total scan angle with an input square wave of 40 V and up to 120 degrees total scan angle with 190 V at a resonance frequency of 2.03 kHz. Although the achievable scan ranges are very large, the useful scan angles will be limited by the angular and polarization dependence properties of the PC reflector and its application. For the 2-D PC scanner presented in this paper, applications that can tolerate 10% decrease in reflectivity will have a scan range of 20 degrees.