Organic-inorganic-hybrid-polymer microlens arrays with tailored optical characteristics and multi-focal properties

被引：23

作者：

Jacot-Descombes, Loic ^{[1
]}

Cadarso, Victor J. ^{[2
]}

Schleunitz, Arne ^{[1
]}

Gruetzner, Susanne ^{[1
]}

Klein, Jan J. ^{[1
]}

Brugger, Juergen ^{[3
]}

Schift, Helmut ^{[2
]}

Gruetzner, Gabi ^{[1
]}

机构：

[1] Micro Resist Technol GmbH, D-12555 Berlin, Germany

[2] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland

[3] Ecole Polytech Fed Lausanne, Microsyst Lab, CH-1015 Lausanne, Switzerland

来源：

OPTICS EXPRESS | 2015年 / 23卷 / 19期

基金：

瑞士国家科学基金会;

关键词：

NUMERICAL APERTURES; FABRICATION; DESIGN;

D O I：

10.1364/OE.23.025365

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Plano-convex microlens arrays of organic-inorganic polymers with tailored optical properties are presented. The fine-tuning of each microlens within an array is achieved by confining inkjet printed drops of the polymeric ink onto pre-patterned substrates. The lens optical properties are thus freely specified, and high numerical apertures from 0.45 to 0.9 and focal lengths between 10 mu m and 100 mu m are demonstrated, confirming theoretical predictions. Combining nanoimprint lithography approaches and inkjet printing enables using the same material for the microlenses and their substrates, improving the optical performances. Microlens arrays with desired specifications are printed reaching yields up to 100% and high lens reproducibility with standard deviations of the apparent contact angle under 1 degrees and of the numerical apertures and focal lengths under 6%. Microlens arrays involving lenses with different characteristics, e.g. multi focal length, and thus focal planes separated by only few microns are printed with the same reproducibility. (C) 2015 Optical Society of America

引用

页码：25365 / 25375

页数：11

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