Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges

被引:84
作者
Jalali, M. [1 ]
Maillard, P. [1 ,2 ]
Wuthrich, R. [1 ]
机构
[1] Concordia Univ, Dept Mech & Ind Engn, Montreal, PQ H3G 1M8, Canada
[2] Ecole Polytech Fed Lausanne, Lab Syst Robot, Stn 9, CH-1015 Lausanne, Switzerland
基金
加拿大自然科学与工程研究理事会;
关键词
CHEMICAL ENGRAVING SACE; ELECTRICAL-DISCHARGE; MATERIAL REMOVAL; SPARK; MECHANISM;
D O I
10.1088/0960-1317/19/4/045001
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Spark-assisted chemical engraving (SACE) is a flexible, simple and inexpensive method for machining electrically non-conductive materials. SACE is particularly interesting because of the high drilling speed that can be achieved compared to other micromachining technologies. In this paper, the issue of drilling speed decreasing from 100 mu m s(-1) to 10 mu m s(-1) for micro-hole depths more than 200-300 mu m is analyzed. To understand better the material removal mechanism, with the target to eliminate this limit, a model for the material removal mechanism as a hybrid mechanism combining local heating and chemical etching is presented and compared with experimental data. The comparison between the model and experiment allowed the estimation of the machining temperature to be around 600 degrees C.
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页数:7
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